Nanoindentation is a cutting-edge technique I employed to characterize the mechanical properties of oxidized refractory multi-principal element alloys (MPEAs), focusing on hardness and modulus. Using the KLA iNano Nanoindenter and Femtotools, I conducted tests on both as-deposited and annealed samples with a diamond Berkovich tip, applying a maximum force of 50 mN and a controlled indentation depth of 250 nm to minimize substrate effects. By utilizing Continuous Stiffness Measurement (CSM) mode and Oliver-Pharr analysis, I obtained precise force-displacement data, calculating hardness and reduced modulus within the 50-70 nm depth range using Inview software. This approach ensured reliable measurements by staying within calibration limits and avoiding substrate influence, with statistical analysis via Student’s t-tests to compare datasets.